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综述了低温制备α-Al2O3涂层研究进展,指出实现低温制备α-Al2O3涂层需解决的关键问题是离子轰击以及增加形核密度,同时展望了低温制备α-Al2O3涂层的发展前景和研究方向。
The progress in the preparation of α-Al2O3 coatings at low temperature is reviewed. The key problems to be solved in the preparation of α-Al2O3 coatings at low temperature are ion bombardment and nucleation density. The development prospect and the research of α-Al2O3 coatings prepared at low temperature direction.