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特凸光学零件的镀膜是一个难题,我们在工作中遇到这样一个零件,其直径为7毫米.凸面的曲率半径为3.5毫米,另一面为平面,零件厚度为4.5毫米,形状如图1所示。透镜材料为锗。在凸表面上需要镀硫化锌增透膜,增透波段为2.2～2.8μ,整个凸球面几乎均为有效表面。这样的零件镀膜时存在三个问题;首先,要保证膜层厚度的均匀性;其次,零件不能直接在膜厚监控仪上用控制光束进行膜厚监控,如果用平面锗片代替,则差别太大;第三,零件如何装夹。
The coating of Tegu optical parts is a challenge we encountered at work with a part that had a diameter of 7 mm, a convex radius of curvature of 3.5 mm and a flat surface on the other side, with a part thickness of 4.5 mm and a shape as shown in Figure 1 Show. The lens material is germanium. On the convex surface need to be coated with zinc sulfide antireflection film, by the transparent band of 2.2 ~ 2.8μ, the entire convex spherical surface are almost all effective surface. First of all, to ensure the uniformity of the thickness of the film; Second, the parts can not be directly on the film thickness monitor with a control beam thickness monitoring, if the plane with germanium film instead of the difference is too Big; third, how to clip parts.