论文部分内容阅读
随着科学技术的发展,离子注入的应用范围在不断扩大.它除了广泛应用于半导体、金属材料的表面改性外,在加工绝缘材料(如玻璃、陶瓷和高分子聚合物等)方面也表现出有一定的发展潜力,有可能在光的波导、磁泡储存,铁电陶瓷、光敏陶瓷、高温陶瓷、表面导电聚合物和表面催化等方面发
With the development of science and technology, the range of application of ion implantation is expanding. In addition to being widely used in the surface modification of semiconductors and metal materials, it is also used in the processing of insulating materials (such as glass, ceramics and polymer) There is a certain potential for development, it is possible in the optical waveguide, bubble storage, ferroelectric ceramics, photosensitive ceramics, high temperature ceramics, surface conductive polymers and surface catalysis hair