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In柱制备是红外焦平面器件倒焊互连的关键工艺,In柱高度是评价In柱制备工艺水平的基本指标。通常的In柱高度统计方法为随机采样人工显微镜观测法,此方法由于采样点较少将导致统计结果不全面,另一方面由于In柱表面形貌的微观特性,人工显微镜观测引入的主观偏差将使统计结果不准确。提出了一种更合理可行的In柱高度统计方法,首先使用激光共聚焦显微镜对In柱表面形貌进行扫描,再利用MATLAB软件对扫描数据进行分析以统计In柱高度,分析时考虑In柱表面微观形貌对In柱高度的影响。利用此方法对16×16面阵的红外焦平面器件读出电路进行了In柱高度统计,统计结果优于随机采样人工显微镜观测法。为评价In柱制备工艺水平提供了更客观准确的In柱高度数据。
In column preparation is the key process of down-welding of infrared focal plane devices. The height of In column is the basic index for evaluating the preparation technology of In-column. The usual method for calculating the height of an In column is a random sampling artificial microscope. Since fewer sampling points lead to incomplete statistics, on the other hand, due to the microscopic characteristics of the surface morphology of the In column, the subjective deviation introduced by the artificial microscope observation Make the statistical result inaccurate. A more reasonable and feasible method for calculating the height of In-column is proposed. First, the surface of In-column is scanned by laser confocal microscopy, and the scan data is analyzed by MATLAB software to calculate the height of In-column. When analyzing, Effect of Micromorphology on In Column Height. Using this method, the height of In column was calculated on the readout circuit of 16 × 16 area array infrared focal plane device. The statistical result was better than that of random sampling artificial microscope. In order to evaluate the level of In column preparation technology provides more objective and accurate In column height data.