准分子激光器是一种高功率、高效率的紫外激光器,在未来利用紫外光技术的光产业中具有独特的作用。目前已在激光化学、激光生物医学和激光新材料等科学领域中显示出潜在的活力。然而最活跃的是准分子激光微细加工技术。图1给出了半导体材料主要加工技术的发展概况。从图1可以看出激光微细加工在半导体技术中的重要地位。本文对该领域的激光曝光、激光CVD、激光掺杂和激光刻蚀技术等四个方面作简要的介绍。 Excimer laser is a high-power, high-efficiency UV laser that plays a unique role in the optical industry that uses UV technology in the future. Has shown potential in the field of science of laser chemistry, laser biomedicine and new laser materials. However, the most active is the excimer laser microfabrication technology. Figure 1 shows the development of the main processing technology for semiconductor materials. From Figure 1 we can see the laser micro-processing in the semiconductor technology an important position. This article briefly introduces the four aspects of laser exposure, laser CVD, laser doping and laser etching in this field.