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研究并设计了一种新型的可应用于微光机电(MOEMS)陀螺的微位移及角度控制致动器。它包括高灵敏度压电陶瓷组件和控制电路,具有对微镜进行微米级位移和角秒级角度精确定位的功能。建立并完成了该致动器的结构模型和有限元仿真,提出了基于MOEMS技术的加工方法。
A new type of micro-displacement and angle-controlled actuator that can be applied to MOEMS gyroscopes is researched and designed. It includes high-sensitivity piezo-ceramic components and control circuitry with the ability to finely position the micromirror at micron-scale and angular-second angles. The structural model and finite element simulation of the actuator were established and completed, and the machining method based on MOEMS technology was proposed.