本文通过电子增强热丝CVD方法在硬质合金基体上沉积金刚石薄膜 ,对硬质合金基体进行酸洗、表面研磨处理后用气相沉积方法沉积约 1μm厚的金属W膜层 ,在形核初期采用逐渐升高的偏流以去除表面形成的非晶C膜 ,并增加金刚石的形核密度和增强W的扩散作用 ,形成多种W -C化合物以增强金刚石薄膜与硬质合金基体的结合力 ,通过这种工艺制备了与基体结合力良好的金刚石薄膜。采用两种途径制备金刚石薄膜涂层工具 ,其一为在YG6硬质合金圆片上沉积约 80 μm的金刚石薄膜 ,经激光切割成 6mm× 6mm的合金片 ,用砂轮抛光 ,焊接在钢制刀柄上 ,经刃磨后制作成木工工具刀头 ;另一是直接在YG6硬质合金钻头这种复杂形状工具上沉积约 10 μm厚的金刚石薄膜制成金刚石工具。对两种工具分别进行使用性能测试 ,木工工具用于加工Al2 O3 复合木地板 ,测试结果表明金刚石薄膜涂层木工工具与硬质合金工具相比 ,使用性能有明显提高 ,寿命提高一倍以上 ,但由于刀刃后角处无金刚石层保护 ,使用中出现明显的后角磨损 ,未能达到理想效果 ;金刚石涂层钻头用于加工硬质合金时在使用初期有明显效果 ,但由于磨损很快 ,使用寿命低 ,经观察分析 ,主要是由于金刚石膜晶粒粗大造成表面光洁度不高 ,使用中刀刃处的金刚石薄膜涂层易于出现应力集中? In this paper, an electron-enhanced hot filament CVD method is used to deposit a diamond thin film on a cemented carbide substrate, and then the cemented carbide substrate is pickled. After the surface grinding process, a metal W film layer with a thickness of about 1 μm is deposited by vapor deposition method, Increasing bias current to remove the surface of the amorphous C film and increasing the density of diamond nucleation and enhance the proliferation of W to form a variety of W -C compounds to enhance the binding force between the diamond film and the cemented carbide substrate by This process prepared a good combination with the substrate diamond film. Diamond coating tools were prepared in two ways. One was to deposit a diamond film about 80 μm on a YG6 cemented carbide wafer, laser cut into 6 mm × 6 mm alloy pieces, polished with a grinding wheel, and welded to a steel shank On the other hand, a diamond tool is made by depositing about 10 μm thick diamond film directly on a complex shape tool such as a YG6 hard alloy drill bit. The performance tests of the two tools were carried out respectively. The woodworking tools were used to process the Al2O3 composite wood floor. The test results showed that compared with the hardmetal tools, the diamond woodworking tools coated with wood thin films have obviously improved their serviceability and their service life more than doubled. However, there is no diamond layer protection at the corner of the blade, and obvious back horn wear occurs during use, which fails to achieve the desired results. Diamond coated drill bits have obvious effect in the early stage of the processing of cemented carbide, but due to rapid wear, Low service life, the observation and analysis, mainly due to the rough diamond crystal grain surface roughness is not high, the use of diamond blade coating at the blade prone to stress concentration?