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使用倾斜角沉积(GLAD)的电子束蒸发技术,制备了倾斜角度在60°~85°之间的ZnS双折射雕塑薄膜(STF)。使用X射线衍射(XRD)和扫描电镜(SEM)检测了ZnS薄膜的结晶状态和断面形貌,使用Lamda-900分光光度计测量了薄膜在不同的偏振光入射时的透过率。研究发现,室温下倾斜沉积ZnS薄膜断面为倾斜柱状结构,且薄膜的结晶程度不高。在相同的监控厚度时,随倾斜角度增大,沉积到基片上的薄膜厚度逐渐变小,但仍然大于余弦曲线显示的理论厚度。根据偏振光垂直入射时薄膜的透过光谱计算了不同角度沉积的薄膜的折射率和双折射。结果显示当倾斜角度为75°时,薄膜的双折射效应最显著,此时Δn=0.044。
ZnS birefringent sculpture film (STF) with tilted angle of 60 ° ~ 85 ° was prepared by electron beam evaporation (GLAD). The crystalline state and cross-sectional morphology of the ZnS films were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The transmittance of the films at different incident angles of polarized light was measured using a Lamda-900 spectrophotometer. It is found that the ZnS thin film deposited at room temperature has oblique columnar structure and the crystallinity of the film is not high. At the same monitoring thickness, as the tilt angle increases, the thickness of the film deposited on the substrate becomes smaller but still greater than the theoretical thickness shown by the cosine curve. The refractive index and birefringence of thin films deposited at different angles were calculated according to the transmission spectrum of the film when the polarized light was incident perpendicularly. The results show that when the tilt angle is 75 °, the birefringence effect of the film is the most significant. At this time, Δn = 0.044.