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同面散射场式电容传感器极板所产生的电场呈散射状,传统的电磁场理论很难得到精确的解析解,给传感器的设计及性能优化带来很大困难。该文在电磁场分析的基础上,采用有限元分析的方法研究了传感器电极结构与敏感特性之间的关系,并通过实验对分析结果进行了验证。结果表明:在用于金属目标的非接触位移测量时,传感器两电极极板间的距离存在最优值;叉指结构传感器量程和灵敏度均优于普通结构传感器。
The electric field produced by the same-field capacitive sensor plate is scattered. The traditional theory of the electromagnetic field is hard to obtain an accurate analytical solution, which brings great difficulties to the design and performance optimization of the sensor. Based on the electromagnetic field analysis, this paper studies the relationship between the sensor electrode structure and the sensitive characteristics by means of finite element analysis. The experimental results verify the results. The results show that there is an optimal value for the distance between the two electrodes of the sensor when used for non-contact displacement measurement of metal target. The range and sensitivity of the interdigital sensor are better than those of the common structure sensor.