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本文从相关函数的性质和相关技术的基本理论出发,证明了圆光栅检验中应用相关法的可能性,并定量地分析了自相关法在这一领域中的应用原理和所得结果的物理意义及其可能实现的测量精度。
Based on the nature of the correlation function and the basic theory of related technologies, this paper proves the possibility of applying the correlation method in the circular grating test and quantitatively analyzes the application of the autocorrelation method in this field and the physical meaning of the results obtained. Its possible measurement accuracy.