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采用PLD法沉积了TiN层,用显微硬度计、扫描电子显微镜、摩擦磨损试验机、电子拉伸试验机等现代分析测试手段对TiN层性能及断面组织进行了系统考察,用有限元法对TiN层与基体的应力分布进行了模拟分析。同时,还对TiN层在推力轴承推力瓦上的应用进行了初步试验。结果表明,PLD法沉积的TiN层与基体间呈冶金结合,结合强度大于70 MPa。
The TiN layer was deposited by PLD method. The properties of TiN layer and the microstructure of the cross-section were systematically investigated by modern analytical methods such as microhardness tester, scanning electron microscope, friction and wear tester, and electronic tensile tester. The finite element method TiN layer and the matrix of the stress distribution were simulated. At the same time, the application of TiN layer on the thrust bearing thrust bearing was also tested. The results show that the TiN layer deposited by PLD method is metallurgically bonded with the matrix, and the bonding strength is greater than 70 MPa.