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In order to study the relationship between thickness and residual stress in CaO-Al2O3-SiO2 glass-ceramics. The residual stress was measured in CaO-Al2 O3-SiO2 system glass-ceramic with different thickness, and the formation mechanism and characterization of residual stress in CAS system Glass-ceramic were analyzed by the X-ray diffraction analysis. The experimental results show the compressive residual stress increases with thickness of glass-ceramic increasing