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采用溶胶–凝胶法制备了掺铝氧化锌(ZAO)薄膜,用X射线衍射(XRD)、紫外–可见光–近红外分光光度计等分析测试手段对薄膜进行了表征;通过正交试验探讨了镀膜层数、溶胶浓度、铝离子的摩尔分数以及退火温度等因素对掺铝氧化锌(ZAO)薄膜近红外反射率的影响,优选了制备具有高近红外反射率的薄膜的工艺参数。研究结果表明,当溶胶浓度为0.9mol/L,Al3+的摩尔分数为0.8%,退火温度为500°C,镀膜层数为15层时,所得薄膜样品的近红外平均反射率达到35.73%,最高反射率达到46.99%,在2000nm附近的最高近红外反射率达到40.38%。
ZAO thin films were prepared by sol-gel method. The films were characterized by X-ray diffraction (XRD), UV-Vis-NIR spectrophotometer and other analytical methods. The influence of the factors such as the number of coating layers, the sol concentration, the mole fraction of aluminum ions and the annealing temperature on the near-infrared reflectivity of ZAO films was optimized. The process parameters for preparing films with high NIR reflectivity were optimized. The results show that when the sol concentration is 0.9mol / L, the mole fraction of Al3 + is 0.8%, the annealing temperature is 500 ° C and the number of coating layers is 15, the average near-infrared reflectance of the obtained film samples reaches 35.73% The reflectance reached 46.99%, and the highest near-infrared reflectance reached about 40.38% at around 2000 nm.