用真空气相沉积法 ,同时蒸发Cd和Te材料 ,在玻璃衬底上沉积CdTe薄膜。对CdTe薄膜掺杂In ,并用氮气作保护气体 ,在不同温度和时间下对薄膜进行热处理 ,研究薄膜的电学特性和光学特性。结果表明 ,用真空气相沉积法制备的CdTe薄膜的电学、光学特性和由其他方法制备的CdTe薄膜的电学和光学特性基本一致 CdTe films were deposited on glass substrates by vacuum vapor deposition while evaporating Cd and Te materials. CdTe thin films doped with In, and nitrogen gas as a protective gas at different temperatures and time of the film heat treatment, electrical and optical properties of the film. The results show that the electrical and optical properties of CdTe thin films prepared by vacuum vapor deposition are basically consistent with those of CdTe thin films prepared by other methods