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采用两层多晶硅表面微加工工艺,研制开发了一种新型的微型可编程闪耀光栅.该光栅具有结构简单、工作谱段宽、光谱连续可调等特点.为了实现可工作闪耀角的最大化,有效利用Dimple结构作为栅条的核心功能组件,其高度接近空气间隙.由实验测得,研制的微型可编程闪耀光栅在驱动电压112V作用下能达到的最大可工作闪耀角约5.19°,对应的最大闪耀波长达到中红外4.88μm.在此基础上,以该微型可编程闪耀光栅为核心的分光元件,研究了其在多光谱成像领域应用的可行性,并搭建了多光谱成像系统的原型样机,得到了较好的实验结果.最后,讨论了该成像系统的优点,并提出了进一步研究的建议.
A novel micro-programmable blazed grating has been developed by using two-layer polycrystalline silicon surface micromachining technology.The grating has the characteristics of simple structure, wide working spectrum and continuously adjustable spectrum.In order to maximize the working blaze angle, The effective use of Dimple structure as the core of the gate component, which is close to the air gap height.From the experiment measured, developed miniature programmable blazed grating at the driving voltage of 112V can reach the maximum working blaze angle of about 5.19 °, the corresponding And the maximum blaze wavelength reaches 4.88μm. Based on this, the feasibility of multi-spectral imaging in the field of multi-spectral imaging is studied based on the micro-programmable blazed grating as the core, and a prototype prototype of multi-spectral imaging system , The better experimental results are obtained.Finally, the advantages of this imaging system are discussed and some suggestions for further research are put forward.