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本文论述了菲索型球面干涉仪检验光学面面形误差与检测曲率半径的测试精度问题,并结合QGY型激光球面干涉仪做了理论分析与计算.
This paper discusses the testing accuracy of the Fissoy spherical interferometer in inspecting the surface error of the optical surface and detecting the radius of curvature, and makes theoretical analysis and calculation based on the QGY laser spherical interferometer.