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微型星用热开关辐射器因其辐射能力可根据需要主动调节,整体采用薄膜和微结构制造,具有轻小、低功耗等的特点,非常适合于微/纳卫星热控应用。国外同类器件主要采用硅工艺制作,由于材料和工艺限制,器件热性能较差。本文提出了一种基于激光微加工技术,采用聚酰亚胺作为结构材料的微型星用热开关辐射器,介绍了器件的工作原理,对器件结构和热性能进行了理论分析,确定了影响器件性能的主要因素。然后采用紫外激光微加工、浸渍提拉法和磁控溅射薄膜沉积等技术制作了微型热开关辐射器样件,并进行了驱动电压和性能测试。测试结果表明,样件驱动电压为97 V,辐射功率调节量约为0.1W。最后对测试结果进行了分析和讨论,提出了改进方案。
Due to its radiation ability, micro-star thermal switch radiators can be actively adjusted according to actual needs. The whole structure is made of thin film and micro structure. It is light, low power consumption and so on. It is very suitable for micro / nano satellite thermal control applications. Similar foreign devices using silicon technology, due to material and process constraints, poor thermal performance of the device. In this paper, we propose a micro-star thermal switch radiator based on laser micromachining technology and using polyimide as the structural material. The working principle of the device is introduced. The structure and thermal performance of the device are analyzed theoretically. The main factor of performance. Then, micro-heat switch radiators samples were fabricated by UV laser micro-machining, dip-pull method and magnetron sputtering film deposition. The driving voltage and performance were tested. The test results show that the sample driving voltage is 97 V, and the radiated power adjustment is about 0.1W. Finally, the test results are analyzed and discussed, and the improvement plan is put forward.