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高精度的重复性是保证检测精度的前提,也是精密检测中最重要的指标之一。在Fizeau干涉仪中,干涉腔对环境特别是温度的变化非常敏感,温度的变化和非均匀性是测量的主要误差来源,也是影响测量重复性的主要因素之一。通过研究光在空气中的传播原理,利用Edlen公式建立了Fizeau干涉仪干涉腔的理论模型,并给出了腔长、温度变化大小与干涉仪重复精度的定量关系。理论分析表明,干涉仪重复精度主要跟温度变化大小和干涉仪腔长有关。利用ZYGO公司的干涉仪,通过实验给出了在不同环境中、不同腔长下干涉仪测量重复精度的变化,并与理论计算进行了比较和分析。
High-precision repeatability is to ensure the accuracy of the premise, but also one of the most important indicators of precision testing. In the Fizeau interferometer, the interferometer cavity is very sensitive to changes in the environment, especially the temperature. Temperature variation and inhomogeneity are the main sources of measurement error and one of the main factors that influence the repeatability of the measurement. By studying the propagation principle of light in air, the theoretical model of Fizeau interferometer cavity was established by Edlen formula, and the quantitative relationship between cavity length, temperature variation and repeater accuracy was given. Theoretical analysis shows that the repeatability of the interferometer is mainly related to the temperature variation and the cavity length of the interferometer. By using ZYGO interferometer, the change of measurement repeatability of interferometer with different cavity length under different environments was given and compared with the theoretical calculation.