柔性微执行器（ＦＭＡ）是一种用于微型机器人上的新型橡胶气动执行器。本文报道了采用三维光刻技术实现了它的微型化和集成化。该项技术也称为成象技术。本文先对研制中出现的两个关键问题进行了讨论。其一是开发一种新的设计方案。该方案我们称之为“增压管束”的ＦＭＡ方案，这种方案的优势在于可通过光刻技术在单片材料上制造出ＦＭＡ，另一个关键问题是材料的选择，通常在准ＬＩＧＡ（光刻、电镀和铸造）工艺中应用的材料是硬化塑料。本文采用了一种新型的树脂材料，我们给出了实验数据来说明如何调整该树脂的组分以获得适当的槽侧壁形状和杨氏模量。本文展示了通过这种三维光刻技术获得的ＦＭＡ结构，包括它的制造设备，“增压管束”ＦＭＡ的弯曲移动行为、气动控制电路的集成化，以及一个５×５ＦＭＡ阵列，我们可以看到这个阵列能够移动一个置于其上的玻璃果盘 Flexible Microactuator (FMA) is a new type of rubber pneumatic actuator for micro robots. This paper reports the miniaturization and integration of 3D lithography. This technique is also known as imaging technology. This article first discusses two key issues that emerged in the development. One is to develop a new design. This solution, which we call the “supercharger” FMA solution, has the advantage of producing FMA on a single piece of material by photolithography. Another key issue is the choice of material, usually in the LIGA Engraving, electroplating and casting) process used in the material is hardened plastic. In this paper, a new type of resin material is used and we present experimental data to illustrate how to adjust the composition of the resin to obtain the appropriate groove side wall shape and Young’s modulus. This article shows the FMA structure obtained through this three-dimensional lithography, including its manufacturing equipment, the bending movement behavior of the “pressurized tube bundle” FMA, the integration of the pneumatic control circuit, and a 5 x 5 FMA array, which we can see This array is able to move a glass plate placed on it