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设计了一套激光光束自动准直系统,能够高速、高精度地自动准直激光输出方向。该系统使用了由小孔衍射放大光束抖动的光路和互补金属氧化物半导体传感器组成的传感模块;系统的信号处理模块是以现场可编程门阵列芯片为核心的电路装置,可实现高速计算和反馈控制功能。软件方面,采用了自动定标的算法来确定自动准直过程中所需的驱动信号,可以使光路调节过程中的水平和竖直方向解耦合,提高了调节的精度和速度。该算法可以实现更高程度的自动化控制。设计了实验以验证自动准直系统性能,结果表明,该装置的调整精度为2.5μm,反馈控制频率约为1kHz,可显著降低频率在1kHz以下的光束抖动。
A laser beam auto-collimation system was designed to automatically collimate the laser output direction with high speed and high precision. The system uses a sensing module composed of an optical path that is diffracted and amplified by a pinhole and a complementary metal-oxide semiconductor sensor. The signal processing module of the system is a circuit device based on a field programmable gate array chip, which can realize high-speed computation and Feedback control function. Software, the use of automatic calibration algorithm to determine the required auto-alignment process of the drive signal, the optical path can be adjusted in the process of horizontal and vertical decoupling and improve the accuracy and speed of regulation. The algorithm can achieve a higher degree of automation control. The experiment was designed to verify the performance of the auto-collimation system. The results show that the device has a tuning accuracy of 2.5μm and a feedback control frequency of about 1kHz, which can significantly reduce the beam jitter at frequencies below 1kHz.