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弹性反冲探测分析法(ERDA)是分析微量氢元素的一种新颖方法。本文介绍用该法分析薄膜中氢含量的方法、原理和初步测量结果,对VYNS膜的测量结果和PIXE法间接分析结果在±10％误差范围内相符。此方法适用于分析厚度为1～10μm的薄样品,灵敏度约为5×10~(15)at./cm~2。
Elastic recoil detection analysis (ERDA) is a novel method of analyzing trace amounts of hydrogen. In this paper, the method, principle and preliminary measurement results of hydrogen content in thin films by this method are introduced. The results of VYNS film and indirect analysis by PIXE method are within ± 10% error range. This method is suitable for the analysis of thin 1 ~ 10μm thick samples with a sensitivity of about 5 × 10 ~ (15) at./cm ~ 2.