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盛美半导体设备(上海)有限公司是一家专注于集成电路制造产业中先进的湿法清洗及铜互连制程技术装备及工艺研发与生产的半导体装备公司,是中国少数几家具有世界领先技术及工艺的半导体装备制造商之一。公司立足于自主研发、精密制造和全球销售及服务,为芯片制造厂商提供最先进的装备及工艺。盛美半导体设备(上海)有限公司自主研发的空间交变相位移兆声波清洗技术解决了单片兆声波清洗能量分布均一性的技术难点,获得了优异的晶圆清洗效果,产品已销往韩国、中国台湾以及国内的主流集成电路制造公司。
Shengmei Semiconductor Equipment (Shanghai) Co., Ltd. is a semiconductor equipment company specializing in R & D and production of advanced wet cleaning and copper interconnection process technology and equipment in the integrated circuit manufacturing industry. It is one of the few companies in China with world’s leading technology and One of the semiconductor equipment manufacturers. The company based on independent research and development, manufacturing precision and global sales and service for chip manufacturers to provide the most advanced equipment and technology. Shengmei semiconductor equipment (Shanghai) Co., Ltd. independent research and development of space-phase phase-shift megasonic sound cleaning technology to solve the monomolecular megasonic cleaning energy distribution uniformity of the technical difficulties, access to excellent wafer cleaning effect, the products have been sold to South Korea, China Taiwan and China’s mainstream integrated circuit manufacturing company.