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用开管水平液相外延系统从富Te溶剂中生长了不同x值的MCT薄膜。经X射线衍射、Hall电学参数、红外光谱、扫描电镜、X射线能谱仪和电子通道花样分析测试,结果表明:外延薄膜表面平整,光学参数较好,纵向、横向组份均匀,晶体结构完整,电学参数较好,外延膜质量优良。短波材料(n型):载流子浓度3.54×10~(14)cm~(-3),迁移率1.63×10~4cm~2V~(-1)s~(-1);中波材料(n型):载流子浓度9.95×10~(14)cm~(-3),迁移率为1.76×10~4cm~2V~(-1)s~(-1);原生长波材料(n型):载流子浓度为2.15×10~(15)cm~(-3),迁移率2.00×10~4cm~2V~(-1)s~(-1)。
MCT thin films with different x-values were grown from Te-rich solvents using an open-tube horizontal liquid-phase epitaxy system. The results of X-ray diffraction, Hall electrical parameters, infrared spectra, scanning electron microscopy, X-ray energy dispersive spectroscopy and electronic channel pattern analysis show that the epitaxial film has the advantages of smooth surface, good optical parameters, uniform longitudinal and transverse components and complete crystal structure , The electrical parameters are better, the quality of epitaxial film. The short-wave material (n-type) has a carrier concentration of 3.54 × 10-14 cm -3 and a mobility of 1.63 × 10-4 cm -2V -1 s -1. n type) with carrier mobility of 9.95 × 10 ~ (14) cm ~ (-3) and mobility of 1.76 × 10 ~ 4cm ~ 2V ~ (-1) s ~ The carrier concentration is 2.15 × 10 ~ (15) cm ~ (-3) and the mobility is 2.00 × 10 ~ 4cm ~ 2V ~ (-1) s ~ (-1).