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本文利用一种新的等离子体沉积技术—真空磁过滤弧沉积（ＦＡＤ）制备得到一种无氢的非晶碳膜。ＥＥＬＳ分析表明，这种非晶碳膜几乎不含有ｓｐ２和ｓｐ杂化键，呈现出高度的金刚石特征，以致可以被称为非晶金刚石（ａＤ）膜。应用紫外透射光谱（ＵＶ）、红外反射光谱以及椭偏测量等方法对ａＤ膜的光学性能进行了测量。利用显微力学探针、Ｘ射线双晶衍射、卢瑟福背散射（ＲＢＳ）技术和ＥＥＬＳ分析等多种测量手段对ａＤ的超显微硬度、应力以及密度等力学和结构特性进行了定量分析。另外，对这种ａＤ膜的场电子发射性能也进行了研究。
In this paper, a new hydrogen-free amorphous carbon film was prepared by vacuum magnetic filtration arc deposition (FAD) using a new plasma deposition technique. EELS analysis shows that this amorphous carbon film contains almost no sp2 and sp hybridization bonds, showing a high degree of diamond features, which can be called amorphous diamond (a D) film. The optical properties of aD films were measured by ultraviolet transmission spectroscopy (UV), infrared reflectance spectroscopy and ellipsometry. The mechanical and structural properties of ultra-microhardness, stress and density of aD were investigated by using a variety of measurement methods such as micromechanical probe, X-ray double crystal diffraction, Rutherford backscattering (RBS) and EELS analysis Quantitative analysis. In addition, this a D film field electron emission properties have also been studied.