【摘 要】
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We investigate the sheath structure of an electronegative plasma at steady state with the assumptions of cold positive ions and hot negative ions. The modified
【机 构】
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State Key Laboratory of Materials Modification by Laser, Electron and Ion Beams, Dalian University o
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We investigate the sheath structure of an electronegative plasma at steady state with the assumptions of cold positive ions and hot negative ions. The modified Bohm criterion is obtained with the Sagdeev potential by introducing a modified ion sound velocity. At the same time the electric potential, net space charge and particles densities in the sheath are analysed in several cases of different temperature ratios of electrons to negative ions and different density ratios of negative ions to positive ions.
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