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以丙酮为碳源,采用热丝化学气相沉积(HFCVD)技术在钽衬底上制备p型硼掺杂金刚石(BDD)薄膜电极。在BDD电极制备过程中,碳源体积分数对它的质量和性能影响很大。利用AFM和XRD分析了丙酮体积分数对BDD电极表面形态和成膜质量的影响。利用循环伏安法研究了采用不同体积分数的丙酮沉积的BDD电极对电化学窗口和背景电流的影响。分别采用BDD电极和不锈钢片作阳极和阴极电解K2SO4溶液,并利用KMnO4滴定法检测BDD电极的氧化效率。结果表明,优化丙酮体积分数可以提高BDD的均匀性和附着力。合适的丙酮体积分数所制备的BDD电极具有电化学窗口宽、背景电流低和电极氧化效率高等特点,有很好的应用前景。
P-type boron-doped diamond (BDD) thin film electrodes were prepared on tantalum substrate by hot filament chemical vapor deposition (HFCVD) using acetone as carbon source. During BDD electrode preparation, the carbon source volume fraction has a great influence on its quality and performance. The effects of acetone volume fraction on the morphology and film quality of BDD electrode were analyzed by AFM and XRD. Cyclic voltammetry was used to investigate the effect of BDD electrodes deposited with different volume fractions of acetone on the electrochemical window and background current. BDD electrode and stainless steel were used as the anode and cathode electrolyzing K2SO4 solution, and KMnO4 titration method was used to detect the oxidation efficiency of BDD electrode. The results show that optimizing the volume fraction of acetone can improve the uniformity and adhesion of BDD. The suitable volume fraction of acetone prepared BDD electrode has the characteristics of wide electrochemical window, low background current and high electrode oxidation efficiency, and has good application prospects.