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采用自制超声喷雾热解装置制得MgO薄膜,用X射线衍射、扫描电子显微镜、紫外可见光分光光度计等研究了MgO薄膜的晶体及微观结构。结果表明,随着沉积温度的提高,薄膜的结晶性能变好,光透射率随之升高;当沉积温度为650℃时,薄膜的晶粒为52.295nm,在可见光波段透射率达到77%。沉积温度对MgO薄膜的晶体结构、表面形貌以及光学特性有显著影响,是调控MgO薄膜结构和光学特性的有效手段。
MgO thin films were prepared by self-made ultrasonic spray pyrolysis apparatus. The crystal and microstructure of MgO thin films were studied by X-ray diffraction, scanning electron microscopy and UV-visible spectrophotometer. The results show that as the deposition temperature increases, the crystallinity of the film becomes better and the light transmittance increases. When the deposition temperature is 650 ℃, the crystal grain of the film is 52.295 nm and the transmittance of visible light reaches 77%. The deposition temperature has a significant effect on the crystal structure, surface morphology and optical properties of MgO films, which is an effective way to control the structure and optical properties of MgO films.