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一、引言高真空范围使用的真空计的一个共同缺点是对真空系统有干扰。普通的冷阴极交叉场真空计,例如冷阴极电离规(PIG)和磁控规,由于长时间放电而使压强随放气和抽气作用而产生波
I. INTRODUCTION One common disadvantage of the vacuum gauges used in the high vacuum range is that they interfere with the vacuum system. Common cold cathode cross-field vacuum gauges, such as cold cathode ionisation (PIG) and magnetron gauges, generate pressure waves with deflation and aspiration due to prolonged discharge