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UNCD薄膜系其晶粒尺寸小于5 nm为主要特征高性能金钢石薄膜,有的研究者称为超纳米膜,具有诸多优异的物理和化学性能,在工业应用中得到广泛的青睐。UNCD不仅具备普通金刚石的各项性能,而且因其极小的晶粒尺寸,使得UNCD薄膜表面极其光滑,大大降低了摩擦系数,不需要进行抛光处理就可以直接进行工业应用,从而大大节省时间和成本。本文综述了近年来通过提高形核密度、气体掺杂、调节衬底温度等方法制备出高质量的UNCD膜,指出随着Ar掺入量的增加,二次形核率提高,晶粒尺寸细化。讨论了UNCD膜在MEMS器件、耐磨材料、表面声波和体声波器件以及生物医学应用领域的优势,并介绍了美国阿贡实验室和ADT公司在UNCD膜领域的研究进展。
UNCD thin films, whose grain size is less than 5 nm, are the main features of high-performance diamond films. Some researchers call them super nanofilms, which have many excellent physical and chemical properties and are widely used in industrial applications. Not only does UNCD have all the properties of ordinary diamond, but its extremely small grain size makes the UNCD film extremely smooth, greatly reducing the coefficient of friction and enabling direct industrial use without the need for polishing, saving significant time and effort cost. In this paper, high quality UNCD films were prepared by increasing the density of nucleation, gas doping and adjusting substrate temperature in recent years. It is pointed out that with the increase of Ar content, the secondary nucleation rate increases and the grain size decreases The The advantages of UNCD film in MEMS devices, wear-resistant materials, surface acoustic wave and bulk acoustic wave devices, and biomedical applications are discussed. The progress of research on UNCD film by Argonne Lab and ADT Company is introduced.