本文提出用化学腐蚀方法加工切型为x+5°,厚度为0.1mm 以下薄型石英音叉振子。该法是在镜面抛光的晶片双面分别蒸铬和蒸金,经涂胶后,双面可光刻出音叉的外形和电极线条,再经分层腐蚀后,在每个晶片上可得到几十乃至上百个音叉,再将音叉上架,调频后即可封装出可用于电子表中的微型振子。本文对上述流程中的工艺要点做了扼要说明并指出该法特点和发展前景。 In this paper, the chemical etching method is used to fabricate a thin quartz tuning fork oscillator of x + 5 ° and a thickness of 0.1 mm. The method is on both sides of the mirror-polished wafer were steamed chromium and steamed gold, after the glue, the double-sided photolithography fork shape and electrode lines, and then by the layered corrosion, available on each chip a few Ten or even hundreds of tuning fork, and then the tuning fork on the shelf, FM can be packaged after the miniature oscillator can be used in electronic watches. This article briefly outlines the process points in the above process and points out the characteristics and development prospects of the law.