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本文提出了一个新的基于外端口直流、交流特性的金属-半导体-金属光电二极管(MSM PD)的等效电路模型,同时给出了直流模型和电容模型参数的物理含义,利用该模型得到的模拟结果和实测结果吻合很好。
In this paper, a new equivalent circuit model of metal-semiconductor-metal photodiode (MSM PD) based on external DC and AC characteristics is proposed. At the same time, the physical meaning of DC model and capacitance model parameters is given. The simulation results are in good agreement with the measured results.