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在考虑中红外高反膜系的非均匀吸收情况下,利用ANSYS有限元分析软件,建立了带高反膜系的变形镜模型。定量分析了连续激光辐照下,变形镜的温升、热形变及其对光束质量的影响。研究结果表明,在使用有限元软件进行分析时,高反膜系的非均匀吸收不可忽略;变形镜极头间距越窄,热形变带来的波前畸变空间频率越高;当入射波前峰谷(PV)值与变形镜热形变面形PV值相差不大时,热形变带来的影响最明显;在总吸收能量一定的情况下,入射激光功率越大,热形变对光束质量的影响越明显。此外,针对不同的换热条件,讨论了变形镜热形变对光束质量的影响,进而针对热形变的产生机理,提出采用局部换热方式降低变形镜的热形变。
Taking into account the non-uniform absorption of the high-IR high-reflective film system, the ANSYS finite element analysis software was used to establish the deformable mirror model with high anti-film system. Quantitative analysis of the continuous laser irradiation, the deformation of the mirror temperature, thermal deformation and the impact of the beam quality. The results show that the non-uniform absorption of high antireflective coatings can not be neglected when the finite element software is used for analysis. The narrower the distance between the tips of the deformed mirrors, the higher the spatial frequency of the wavefront distortion caused by thermal deformation. The influence of thermal deformation is most obvious when the valley (PV) value is not significantly different from the PV value of the deformed surface of the deformable mirror. Under the condition of a certain amount of total absorbed energy, the larger the incident laser power is, the more the thermal deformation affects the beam quality The more obvious. In addition, according to the different heat transfer conditions, the effect of the deformation of the mirror on the beam quality is discussed. In order to reduce the thermal deformation of the deformable mirror, a local heat transfer method is proposed to reduce the thermal deformation.