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将钛酸铅薄膜溅射在以硅片为衬底的微型薄膜悬臂上,已研制成了一种硅单片超声传感器.这种器件的尺寸为长和宽均约几十至几百μm(宽略小于长).测定了频率范围直至150kHz的超声响应.给出了谐振频率、灵敏度和品质因子与某些设计参数如膜的种类和尺寸之间关系的技术数据.35kHz时典型的灵敏度和品质因子分别为-102dB和290.这种三元列阵传感器比单元传感器有着更敏锐的定向性.
The lead titanate film is sputtered on a silicon wafer-based micro-film cantilever and a silicon monolithic ultrasonic sensor has been developed. The size of such a device is about several tens to several hundreds of micrometers The width is slightly less than the length.) The ultrasonic response in the frequency range up to 150 kHz is measured. The technical data for the relationship between the resonance frequency, the sensitivity and the quality factor, and certain design parameters such as the type and size of the film are given. Typical sensitivities at 35 kHz and The quality factor is -102dB and 290 respectively. This ternary array sensor has a more directional orientation than the cell sensor.