1.前言最近,在高精度测量轮廓和位置的领域,测量距离和位移的非接触式传感器吸引了很大兴趣。通过这些传感器采用光学方法,大多数情况下激光二极管(LD)用作为传感器的光源。然而,使用 LD 通常都是因为它有高的光强度,直至现在才有几例报道 LD 的相干特性作 1. Introduction Recently, non-contact sensors for measuring distance and displacement have drawn great interest in the field of measuring profiles and positions with high precision. Through these sensors using optical methods, most of the time the laser diode (LD) as a sensor light source. However, the use of LD is usually due to its high light intensity, and until now only a few cases have been reported for the coherence properties of LD