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室温下在HF水溶液中,利用阳极氧化法在纯钛表面制备了规则有序的TiO2纳米管阵列,应用场致发射扫描电子显微镜、X射线光电子能谱对纳米管阵列表面形貌、断面结构及元素组成进行表征,并对所得样片的场发射性能进行测试,研究了阳极氧化电压对TiO2纳米管阵列形貌及场发射性能的影响。结果表明:在一定范围内增大氧化电压,可增大纳米管的管径、壁厚和管长,但壁厚变化比较小。随着氧化电压的增大,开启场强先降低后增大。当氧化电压为10V时,所获得的TiO2纳米管阵列开启场强最低,为3.15 V/μm,在6 h内8 V/μm电场下保持了稳定的场发射,电流密度为0.85 mA/cm2。
At room temperature in HF aqueous solution, an ordered array of TiO2 nanotubes was prepared on the surface of pure titanium by anodic oxidation. The surface morphology, cross-sectional structure and morphology of nanotube arrays were characterized by field emission scanning electron microscopy and X-ray photoelectron spectroscopy Elemental composition, and the field emission properties of the resulting samples were tested. The effect of anodization voltage on the morphology and field emission properties of TiO2 nanotube arrays was investigated. The results show that increasing the oxidation voltage within a certain range can increase the tube diameter, wall thickness and tube length of the nanotube, but the change of the wall thickness is relatively small. As the oxidation voltage increases, the turn-on field strength decreases first and then increases. When the oxidation voltage is 10V, the obtained TiO2 nanotube array has the lowest on-field intensity of 3.15 V / μm and a stable field emission at a current density of 0.85 mA / cm2 at 8 V / μm for 6 h.