:研究气体电离放电产生臭氧的等离子体物理、等离子体化学过程 ,实现了用电子能量控制氧分子、臭氧分子离解及臭氧生成过程 ,采用放电电场的折合电场强度达到 3 0 0～ 80 0 Td,电子获得平均能量达到 8.4～ 1 8.0 e V,使臭氧浓度达到 2 5 0 g/m3 ,产生效率达到 2 0 0 g/(k W· h) . : To study the plasma physical and plasma chemical processes that generate ozone by gas ionization discharge and to realize the process of controlling oxygen molecules, ozone molecular dissociation and ozone generation by using electron energy. The equivalent electric field strength of discharge electric field reaches 300 ~ 80 0 Td, The average energy of the electrons reached 8.4-1.08 eV, bringing the ozone concentration to 250 g / m3 and generating efficiency of 200 g / (kWh).