离子溅射制膜是近年来发展起来的一种新技术。由于所获得的溅射层有许多优点,在防腐、耐磨、装饰和制备新材料等方面得到了越来越广泛的应用,对薄膜本身的研究也日趋活跃。本文用AES研究了铜箔上TiC溅射膜升温过程中的表面成分的偏析和深度方向成分的变化。升温过程中出现碳偏析现象,可能影响薄膜的摩擦学性能。 Ion sputtering film is developed in recent years, a new technology. Since the obtained sputtering layer has many advantages, more and more applications have been made in the fields of preservation, wearability, decoration and preparation of new materials, and the research on the film itself has also become increasingly active. In this paper, the surface composition segregation and depth direction composition of TiC sputtered films on copper foil were investigated by means of AES. Carbon segregation occurs during the heating process, which may affect the tribological properties of the films.