论文部分内容阅读
利用微悬梁器技术**证明对微机械光学和红外的探测是可行的。微悬梁器技术提供了一个简单的方法来研制单元和多元传感器,用于可见光和红外辐射的探测。这类传感器与量子探测器或热探测器比较起来,体积更小,灵敏度更高,成本更低。表面镀着一层热吸收层的微悬梁器会弯曲,这是由双金属效应产生的不均匀应力所引起的。微悬梁器的弯曲程度取决于吸热总量,并可利用光学方法或电学方法探测出来,例如可利用在压阻悬梁方面的电阻变化进行探测。微悬梁传感器有两个独特的热响应时间常数:快的一个(τ_1(热)<1ms)和慢的一个(τ_2(热)～10ms)。测出这种器件的噪声等效温差NEDT=90 mK。当未镀吸收层的微悬梁器受到一束低功率二极管激光(波长λ=786 nm)的辐照时,发现噪声等效功率NEP=3.5 nW/Hz~(1/2),相当于调制频率为20 Hz时的比探测率 D~*= 3.6×10~7cm·Hz~(1/2)/W。
Using Micro-Beam Suspension Technology ** Proven for the detection of micro-mechanical optics and infrared is feasible. Micro-cantilever technology provides an easy way to develop cells and multiple sensors for the detection of visible and infrared radiation. Such sensors and quantum detectors or heat detectors compared to smaller, higher sensitivity and lower cost. A micro-beam with a heat-absorbing layer on the surface will bend due to the inhomogeneous stress created by the bimetallic effect. The degree of bending of the micro-cantilevers depends on the total amount of heat absorbed and can be detected optically or electrically, for example by using a resistance change in piezoresistive cantilever. Micro-cantilever sensors have two unique thermal response time constants: fast one (τ_1 (heat) <1ms) and slow one (τ_2 (heat) ~ 10ms). The noise equivalent temperature difference for this device, NEDT = 90 mK, was measured. When the uncooled micro-beam was irradiated by a low-power diode laser (wavelength λ = 786 nm), the noise equivalent power NEP was found to be 3.5 nW / Hz ~ (1/2), corresponding to the modulation frequency The detection ratio at 20 Hz is D * * = 3.6 × 10 ~ 7cm · Hz ~ (1/2) / W.