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法布里-珀罗干涉标准具的制作,是一项技术要求较高、困难较大的加工工艺,国内介绍很少。本文较详细的介绍了加工的全过程。在标准平板的加工与测试中,提出了用石墨作填料的薄型抛光膜,对多光束干涉进行了研究试验,并开始了实际应用;在隔圈加工中,提出了在玻璃平板上抛光的方法和测试方法;整体的检验,应用了测量激光等倾干涉环级次变化的方法和激光点光源法。初步解决了中等精度法布里-珀罗干涉标准具的加工工艺和检测方法。
The Fabry-Perot etalon fabrication is a more technically demanding and difficult process, with few domestic introductions. This article describes the whole process in more detail. In the processing and testing of the standard flat plate, a thin polishing film with graphite as a filler is proposed to study the multi-beam interference and start practical application. In the process of the spacer ring, a method of polishing on a glass flat plate is proposed And test methods; the overall test, the application of the method of measuring the level change of the laser interfering ring and the laser point light source method. A preliminary solution to the medium precision Fabry-Perot interference etalon processing technology and testing methods.