Comb-drive devises have been widely applied in many fields. However, the application of high frequency sensor, such as rocket chamber, still remains problems. I
The present paper is concerned with the study of two main points: clarifying the effect of preheating on the surface microscopic shape of coating layer by vacuu
The high speed maglev is mainly characterized by propulsion using linear synchronous motor (LSM) and vehicle levitation from the guideway surface. In LSM propul
Piezoelectric actuators (PEAs) have been widely used in micro- and nanopositioning applications due to their fine resolution, fast responses, and large actuatin