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对含50%AlN颗粒的铝基复合材料进行预处理后,在其表面依次采用浸锌化学镀镍工艺制备Ni-P过渡层,采用脉冲偏压磁过滤多弧离子镀工艺沉积硬质Ti/TiN调制周期膜,采用脉冲等离子体化学气相沉积工艺制备含氢类金刚石(DLC)膜等工艺最后形成了多层复合薄膜体系。利用X射线衍射仪、扫描电子显微镜、光谱仪、原子力显微镜、微载荷显微硬度仪、摩擦磨损试验机等设备分析了复合薄膜的组织结构、膜层形貌、截面形貌、显微硬度和摩擦系数等性能特点。测试表明:铝基复合材料/Ni-P层/Ti/TiN调制周期膜/含氢DLC膜这一梯度膜系具有结构交替变化,相邻界面形成混合层,性能梯度分布,硬度逐渐增加,摩擦系数小的特点。该复合工艺能够有效地解决铝基复合材料上制备硬质厚膜的热适配和晶格错配度大的难题,制备薄膜具有良好的膜基结合性能。
After pretreatment of the aluminum matrix composites containing 50% AlN particles, the Ni-P transition layer was prepared on the surface by immersion zinc electroless nickel plating process, and the hard Ti / TiN modulation cycle film, the use of pulsed plasma chemical vapor deposition process for the preparation of hydrogen-containing diamond (DLC) film process finally formed multilayer composite film system. The structure, film morphology, cross-sectional morphology, microhardness and friction of the composite films were analyzed by means of X-ray diffraction, scanning electron microscopy, spectrometer, atomic force microscope, micro-load microhardness tester and friction and wear tester. Coefficients and other performance characteristics. The results show that the gradient films of Al-based composite / Ni-P / Ti / TiN / DLC films have the alternating structure, the mixed layers are formed at the adjacent interfaces, the gradient distribution of the properties, the hardness increases, Small coefficient of the characteristics. The composite process can effectively solve the problem of large thermal fit and large lattice mismatch in preparing hard thick films on aluminum matrix composites, and the prepared films have good film-based bonding properties.