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无掩模电镀已经通过一种新技术途径实现了,这种新技术使用连续波或脉冲激光器,让激光聚焦在电镀槽中的某个电极上。在光功率密度约为10~4瓦/厘米~2时,阴极上吸光区域里电镀增强速度约达10~3倍。激光扫描沿扫描轨迹产生一个电镀图形。一种基于对流质量传递的定性理论被用来解释这些结果。
Maskless plating has been achieved with a new technology that uses continuous wave or pulsed lasers to focus the laser on one of the electrodes in the bath. In the optical power density of about 10 ~ 4 watts / cm ~ 2, the cathodic absorption area electroplating enhanced speed of about 10 to 3 times. Laser scan produces a plated pattern along the scan path. A qualitative theory based on convection mass transfer is used to explain these results.