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介绍了电子束蒸发ＷＯ３膜和以该膜为敏感材料的Ｈ２Ｓ气体传感器工艺，分析了膜的灵敏度和膜的稳定性以及掺金和分步热处理对器件性能的影响
The electron beam evaporation of WO3 film and the H2S gas sensor with the film as the sensitive material are introduced. The sensitivity of the film and the stability of the film are analyzed. The effects of gold-doped and stepwise heat treatment on the device performance are also analyzed