大规模集成电路生产中对超纯水有非常高的要求,其水质指标为:25℃时的电阻率在18兆欧·厘米以上,0.2微米以上的微粒总数在50个/毫升以下,细菌数在5个/毫升以下,总有机碳在1.0毫克/升以下,溶解氧在0.3毫克/升以下,供给温度25℃±5℃,供给压力1.5～2.0公斤/厘米~2。文章介绍了一种超纯水制造系统。该系 In the production of large-scale integrated circuits, there is a very high requirement for ultrapure water, and its water quality indicators are: the resistivity at 25°C is above 18 megohm·cm, the total number of particles above 0.2 μm is below 50/ml, and the number of bacteria Below 5 cells/ml, total organic carbon is below 1.0 mg/l, dissolved oxygen is below 0.3 mg/l, supply temperature is 25°C ± 5°C, and supply pressure is 1.5 to 2.0 kg/cm2. The article describes an ultrapure water manufacturing system. The Department