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本文主要介绍了锆吸气泵的原理,以及在真空靶室上应用锆吸气泵所获得的良好结果,为解决靶室静态真空保持问题提供新的思路和技术方法。
This paper mainly introduces the principle of the zirconium aspirator pump and the good results obtained by using zirconium aspirator pump in the vacuum target chamber. It provides a new idea and technical method for solving the problem of static vacuum in the target chamber.