1 前言材料科学和超精细加工技术已成为当今世界衡量一个国家科学技术发展水平的重要标志,构成了微电子技术、电子计算机、机械、汽车、航天工业发展的基石。随着科学技术的发展,人们对物质的认识日益深入,改造世界的能力也不断增强,现在已经能够实现分子和原子水平上的操作,达到了纳米级精度。而“纳米级技术”自从70年代初期被提出以来,受到了 1 Foreword Materials science and ultrafine processing technology have become an important symbol in today’s world in measuring the level of development of science and technology in a country. They form the cornerstone of the development of microelectronics, computer, machinery, automotive and aerospace industries. With the development of science and technology, people’s understanding of matter is deepening day by day, and their ability to transform the world is also constantly increasing. Now they have been able to operate at the molecular and atomic levels and achieve nanoscale accuracy. The “nano-scale technology” has been proposed since it was introduced in the early 1970s