论文部分内容阅读
介绍了一种用于微波电路的中功率薄膜衰减器的设计与制作。该衰减器是由铝原子含量为50％的Ta／Al合金薄膜制成。测试结果表明其性能优良。
The design and manufacture of a medium power attenuator for microwave circuits are introduced. The attenuator is made of a Ta / Al alloy film with an aluminum atomic content of 50%. The test results show that its performance is excellent.