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许多研究工作表明,薄膜材料有可能具有不同于块体材料的晶体结构.由于实验条件、制备工艺不同,同种薄膜材料也有可能具有不同的晶体结构.如钛膜的研究工作表明,用直流磁控溅射法可得到体心立方晶体结构的纳米钛膜;用电子回旋共振等离子体溅射法可得到面心立方结构的纳米钛膜.本文报道了真空蒸发沉积法制备的钛膜生长初期的分形现象和晶体结构的变化,并对成膜机制作了初步探讨.
Many studies have shown that the film material may have a different crystal structure from the bulk material.Because of different experimental conditions and preparation methods, the same kind of film material may also have different crystal structures.For example, the research on the titanium film shows that using DC magnetic Controlled sputtering method can obtain the body-centered cubic crystal structure of the nano-titanium film; Electron cyclotron resonance plasma sputtering method can be obtained face-centered cubic titanium nano-film structure.This paper reports the vacuum evaporation deposition method of titanium film growth in the early Fractal phenomenon and the change of crystal structure, and made a preliminary discussion on the film forming mechanism.