论文部分内容阅读
Target voltage behaviour of a vanadium-oxide thin film during reactive magnetron sputtering
【机 构】
：
State Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Infor
【出 处】
：
中国物理B（英文版）
【发表日期】
：
2011年3期
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