迄今为止’人们都喜欢用扩散和涡轮分子泵作为镀膜设备的抽气手段。随着操作可靠和不用保养的低温致冷机的发展，使低温泵同样能应用于镀膜设备。 本文所介绍的试验是使用一台在２０°Ｋ工作温度下具有１０瓦致冷功率的低温泵，其对氮的抽速为４５００升／秒，对氢为７０００升／秒。对氢具有这样高的抽速，这对镀膜设备正是特别重要，在低温面上涂上活性碳才能达到这样高的抽速。 So far, people like to use diffusion and turbopumps as a pumping device for coating equipment. With the development of reliable and maintenance-free cryogenic coolers, the cryogenic pump can also be applied to coating equipment. The experiment described here uses a cryogenic pump with 10 watts of refrigeration power at an operating temperature of 20 ° K with a pumping rate of 4500 liters per second for nitrogen and 7000 liters per second for hydrogen. With such a high hydrogen pumping speed, which is very important for coating equipment, coated with activated carbon on the low temperature surface to achieve such a high pumping speed.